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AssigneeCanon Kabushiki Kaisha
InventorsMasaru Nakayama, Osamu Takamatsu, Takayuki Yagi, Keisuke Yamamoto, Takehiko Kawasaki, Yasuhiro Shimada, Yoshio Suzuki
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A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed.
An information apparatus, comprising:
A method of using a probe drive mechanism in an information processing apparatus, the probe drive mechanism having a cantilever portion with a piezoelectric layer disposed between electrode layers, a micro-tip for detecting a tunnel current and an electrode for receiving the tunnel current, a processing circuit portion, positioned adjacent to the cantilever portion, which drives the cantilever portion, and detects and amplifies the tunnel current, a substrate for supporting the cantilever portion and the processing circuit portion, a protection layer for covering said processing circuit portion and a portion of said substrate, wherein the cantilever portion is formed on the protection layer adjacent to the processing circuit portion, said method comprising the steps of:
Dependencies are inferred from the claim text.