US 5,398,112 AGranted

Method for testing an optical window with a small wedge angle

AssigneeWyko Corporation

InventorsChiayu Ai, James C. Wyant

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Abstract

The invention provides a technique for eliminating "ripple" or ghost fringes from a wavefront transmitted by an optical window with a very small wedge angle, distortions in the wavefront being measured by an interferometer. A collimated beam produced by the interferometer is transmitted through the optical window, which is tilted so as to prevent direct reflections from entering a detector of the interferometer. The beam transmitted through the window is reflected by a return flat back through the window and transmitted to the detector. The return flat is tilted slightly in the direction of or opposite to the direction of tilt of the window, causing the re-incident angle of the returned ray to be different from the original incident angle of the collimated beam. This causes the multiple reflections within the window to be different and to be out of phase. The ghost fringes are cancelled by appropriately tilting the return flat.

Claims10

Dependent claims

A method for avoiding distortion in a wavefront transmitted through an optical window having a very small wedge angle during measurement of the wavefront by an interferometer including optics producing a collimated beam, a return flat in the path of the collimated beam, and a detector producing signals representing an image of an interferogram produced by interference between a reference wavefront reflected from a reference surface and a reflection of a transmitted wavefront by the return flat, the interferogram including main interference fringes representing distortion caused in the transmitted wavefront by the optical window and one or more ghost fringes caused by multiple reflections within the optical window, the method comprising the steps of:

(a) positioning the optical window in the path of the collimated beam so the optical window is tilted in a first direction to cause the collimated beam to have a particular incident angle with respect to the optical window;
(b) transmitting the collimated beam through the optical window to produce the transmitted wavefront and causing it to propagate to the return flat, the return flat being perpendicular to the collimated beam, the transmitted wavefront experiencing multiple reflections in the window;
(c) reflecting the transmitted wavefront from the return flat back through the optical window, the reflected wavefront experiencing multiple reflections in the window, a faint ghost fringe interference pattern including one or more of the ghost fringes appearing in the interferogram being resolved by the detector;
and
(d) tilting the return flat in a particular direction until the ghost fringe interference pattern in the image produced by the detector disappears.

2 more elements

A method for avoiding distortion in a wavefront transmitted through an optical window having a very small wedge angle during measurement of the wavefront by an interferometer including optics producing a collimated beam, a return surface, and a detector producing signals representing an image of an interferogram produced by interference between a reference wavefront reflected from a reference surface and a reflection of a transmitted wavefront by the return surface, the interferogram including main interference fringes representing distortion caused in the transmitted wavefront by the optical window and one or more ghost fringes caused by multiple reflections within the optical window, the method comprising the steps of:

(a) positioning a transmission sphere in the path of the collimated beam;
(b) positioning the optical window in a path of a beam focused by the transmission sphere so the optical window is tilted in a first direction to cause a direction of propagation of the beam focused by the transmission sphere to have a particular incident angle with respect to the optical window;
(c) transmitting the beam focused by the transmission sphere through the optical window to produce the transmitted wavefront and causing it to propagate to the return surface, the return surface being perpendicular to rays of the transmitted wavefront, the transmitted wavefront experiencing multiple reflections in the window;
(d) reflecting the transmitted wavefront from the return surface back through the optical window, the reflected wavefront experiencing multiple reflections in the window, a faint ghost fringe interference pattern including one or more of the ghost fringes appearing in the interferogram being resolved by the detector;
and
(e) tilting the return flat in a particular direction until the ghost fringe interference pattern in the image produced by the detector disappears.

3 more elements

Dependencies are inferred from the claim text.