Light transmissive, electrically-conductive, oxide film and methods of production
AssigneeMinnesota Mining and Manufacturing Company
InventorNang T. Tran
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Abstract
A light transmissive, electrically conductive oxide comprising tin and a Group II element is doped with a Group III element and with one or more of hydrogen or fluorine. The oxide may be deposited by sputtering at a temperature in the range from 25.degree. to 350.degree. C., or by chemical vapor deposition at temperatures in the range from 80.degree. to 400.degree. C.
Claims5
A light transmissive, electrically-conductive oxide film comprising tin and a Group II element, said oxide film being doped with a Group III element and with a dopant selected from the group consisting of hydrogen, fluorine, and mixtures thereof.
A detector device comprising:
- a) a film comprising energy-sensitive material which generates an electrical signal upon exposure to electromagnetic radiation;
- b) a light transmissive, electrically-conductive layer in electrical contact with a side of said film;
- and
- c) connecting means in electrical contact with said light transmissive, electrically-conductive layer for connecting the device to an external circuit;
- wherein said light transmissive, electrically-conductive layer comprises an oxide comprising tin and a Group II element, said oxide being doped with a Group III element and with a dopant chosen from the group consisting of hydrogen, fluorine, and mixtures thereof.
Dependencies are inferred from the claim text.