Powder beam etching machine
AssigneeSony Corporation
InventorAkihito Fujutani
Life of this patent
Estimating the term…
Abstract
In a powder beam etching machine, a etching chamber is of a double wall type with an outer sleeve and an inner sleeve. A bowl-shaped lid is provided to an inner surface of a lid to face the inner sleeve. The flow of gas containing fine particles injected from a nozzle is deflected to be led to a suction port. Thus, any stagnation of the fine particles within the etching chamber of the powder beam etching machine is avoided and any leakage of the particles to the outside is prevented. It is possible to clean a work within the etching chamber.
Claims4
A power beam etching machine for injecting gas containing fine particles to a work held within an etching chamber for etching the work, said etching machine comprising:
- an outer sleeve;
- said outer sleeve having a lid portion provided openable and closable at its upper edge and an opening portion in fluid communication with an outside atmosphere in the vicinity of its lower edge;
- and
- an inner sleeve;
- said inner sleeve being provided substantially coaxially within said outer sleeve, said inner sleeve being provided with a suction port extending from a bottom surface of said outer sleeve,
- said etching machine further comprising:
- a bowl-shaped ceiling lid mounted to face an upper end opening portion of said inner sleeve, said bowl-shaped ceiling lid being mounted on an inner surface of said lid portion, and said bowl-shaped ceiling lid being provided with a work mounting table at a center of a lower surface thereof;
- and
- a nozzle provided axially through a center of said inner sleeve for injecting gas containing said fine particles to said work mounted on said work mounting table.
Dependencies are inferred from the claim text.