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US 5,396,795 AGranted
Semiconductor sensor device for measuring intake flow rate
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorToru Araki
Life of this patent
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Abstract
The semiconductor flow rate detector comprises a semiconductor chip having sensor elements on its surface, leads connected to connecting terminals of the semiconductor chip, and a resin base covering junctions between the leads and the connecting terminals of the semiconductor chip and integrally holding them.
Claims9
A semiconductor sensor device, comprising:
- a semiconductor chip including on its surface a sensor element and a connecting terminal connected to said sensor element;
- a lead connected to said connecting terminal;
- and
- a base for covering only a junction between said connecting terminal and said lead with said sensor element exposed and integrally holding said semiconductor chip and said lead, wherein said semiconductor chip further includes a first resin wall formed around said sensor element on said surface of said semiconductor chip and a second resin wall formed in a position on an opposite face of said semiconductor chip which corresponds to the position of said first resin wall with respect to said surface of said semiconductor chip.
1 more element
Dependencies are inferred from the claim text.