Solid state imaging device having partition wall for partitioning bottom portions of micro lenses

Abstract

A solid state imaging device capable of efficiently collecting incident light onto its photodetecting portions and a method for manufacturing the device are provided. A plurality of photodetecting portions and an electric charge transfer portion are formed on a surface of a semiconductor substrate, and a flattening layer which has a light transmitting property and serves to cover the plural number of photodetecting portions and the electric charge transfer portion are formed. A partition wall material layer for covering the flattening layer is formed, and a plurality of approximately rectangular regions of the partition wall material layer are removed to form a partition wall. Then, a thermosoftening resin layer which has a light transmitting property and serves to cover the flattening layer and the partition wall is formed. A region of the thermosoftening resin layer covering the partition wall is removed to form a rectangular parallelepiped thermosoftening resin block corresponding to each photodetecting portion. The thermosoftening resin block is softened by heat application to be thermally transformed into a plurality of micro lenses of which bottom portions are peripherally partitioned by the partition wall.

Dependencies are inferred from the claim text.