Thin film transistor device having driving circuit and matrix circuit
AssigneeCasio Computer Co., Ltd.
InventorHiroshi Matsumoto
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AssigneeCasio Computer Co., Ltd.
InventorHiroshi Matsumoto
Estimating the term…
A thin film semiconductor device comprises a matrix circuit portion and a peripheral circuit portion. An NMOS thin film transistor included in the peripheral circuit portion comprises as an active layer a polysilicon thin film formed on a substrate, leading to a high on-current and an improved switching speed, compared with a thin film transistor including as an active layer of a polysilicon thin film which is obtained by crystallizing an amorphous silicon thin film. An NMOS thin film transistor included in the matrix circuit portion also comprises as an active layer a polysilicon thin film which is formed on the substrate. However, the gate insulating film of an NMOS thin film transistor in the matrix circuit portion as a whole is made thicker than that in the NMOS thin film transistor included in the peripheral circuit portion because of the presence of a first interlayer insulating film.
A thin film semiconductor device, comprising:
A thin film semiconductor device, comprising:
Dependencies are inferred from the claim text.