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US 5,396,066 AGranted
Displacement element, cantilever probe and information processing apparatus using cantilever probe
AssigneeCanon Kabushiki Kaisha
InventorsTsutomu Ikeda, Keisuke Yamamoto, Masaru Nakayama, Takayuki Yagi, Haruki Kawada
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Abstract
A displacement element including a substrate having electrodes and a cantilever provided on the substrate, wherein the cantilever is formed from a semiconductor material and has at least two electrostatic driving electrodes formed by diffusing an impurity into a semiconductor material.
Claims18
A displacement element, comprising:
- a substrate having an electrode;
- and
- a cantilever on the substrate, said cantilever comprising a semiconductor material and at least two electrostatic driving electrodes, said electrostatic driving electrodes being formed by diffusing an impurity into the semiconductor material.
A cantilever probe, comprising:
- a substrate having an electrode;
- and
- a cantilever on the substrate, said cantilever having a microtip on a free end portion thereof, said cantilever comprising a semiconductor material and at least two electrostatic driving electrodes, said electrostatic driving electrodes being formed by diffusing an impurity into the semiconductor material.
An information processing apparatus comprising means for recording, reproducing and erasing information from a recording medium comprising:
- means for bringing a cantilever probe provided with a microtip adjacent to the recording medium;
- means for applying a voltage between the microtip and the recording medium;
- wherein the cantilever probe comprises:
- a substrate having an electrode and a cantilever on the substrate, said cantilever having a microtip on a free end portion thereof, said cantilever comprising a semiconductor material and at least two electrostatic driving electrodes, said electrostatic driving electrodes being formed by diffusing an impurity into the semiconductor material.
1 more element
Dependencies are inferred from the claim text.