Positive resist composition containing a novolak resin made from an aldehyde and dimer of isopropenyl phenol
AssigneeSumitomo Chemical Company, Limited
InventorsYasunori Uetani, Haruyoshi Osaki, Naoki Takeyama, Yuji Ueda, Hiromi Ueki, Takehiro Kusumoto
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Abstract
A novolak resin made from a carbonyl compound and a specific phenol compound, which resin has good properties, in particular, as a base resin of a photoresist.
Claims10
A positive resist composition comprising in admixture a quinone diazide compound prepared by a condensation reaction of naphthoquinone diazide sulfonyl chloride or benzoquinone diazidesulfonyl chloride with a compound having a hydroxyl group in the presence of a weak alkali, and an alkali-soluble novolak resin which is obtainable by a condensation reaction of an aldehyde and a compound of the formula:
- ##STR17## wherein E.sub.1 to E.sub.9 are the same or different and independently a hydrogen atom, an alkyl group, a halogen atom or a hydroxyl group, provided that at least one of E.sub.1 to E.sub.9 is a hydroxyl group and that at least two of E.sub.1 to E.sub.9 at the ortho- and para-positions to said at least one hydroxyl group are hydrogen atoms.
Dependencies are inferred from the claim text.