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AssigneeSumitomo Electric Industries, Ltd.
InventorsKouichi Sogabe, Takahiro Matsuura, Seiji Nakahata, Akira Yamakawa
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An aluminum nitride powder having a surface layer containing an oxynitride characterized in that the surface layer of the aluminum nitride particle contains an aluminum oxynitride which has an oxygen content of 5 to 75 mol % in terms of Al.sub.2 O.sub.3 /(Al.sub.2 O.sub.3 +AlN). The surface layer of the aluminum nitride powder may contain, besides the aluminum oxynitride, at least one other oxynitride selected from among oxynitrides of Mg, Ca, Ba, Ti, V, Cr, Co, Ni, Cu, Ga, Ge, Zr, Nb, Mo, Ru, Hf, Ta, W, Li, B, Si, Y, Sc and rare metal elements and the aluminum oxynitride and at least one other oxynitride have a total oxygen content in the range of 10 to 75 mol % in terms of (3.times.oxygen amount)/(3.times.oxygen amount+nitrogen amount). The alumina nitride powder can easily be converted into a sintered body having excellent sinterability and favorable characteristics, since the above surface layer reduces the penetration of oxygen from the surface layer into the crystal grains and prevents the formation of microcracks layer.
An aluminum nitride powder having a chemically stabilized surface layer containing an oxynitride and having a thickness of 10 to 100 .ANG., said surface layer containing aluminum oxynitride having an oxygen content of 5 to 75 mol %, in terms of Al.sub.2 O.sub.3 /(Al.sub.2 O.sub.3 +AlN), said oxygen content being effective in suppressing the amount of oxygen in solid solution form, said surface layer further preventing formation of microcracks, and suppressing penetration of oxygen into the crystal grains of said aluminum nitride powder.
An aluminum nitride powder having a chemically stabilized surface layer having a thickness of 10 to 100 .ANG., said surface layer containing aluminum oxynitride and at least one other oxynitride selected from the group consisting of oxynitrides of Mg, Ca, Ba, Ti, V, Cr, Co, Ni, Cu, Ga, Ge, Zr, Nb, Mo, Ru, Hf, Ta, W, Li, B, Si, Y, Sc, and rare earth elements, said aluminum oxynitride and at least one other oxynitride having a total oxygen content of 10 to 75 mol % in terms of (3 times oxygen content)/(3 times oxygen content plus nitrogen content), said oxygen content being effective in reducing the amount of oxygen in solid solution form, said surface layer further being effective in preventing formation of microcracks and suppressing penetration of oxygen into the crystal grains of said aluminum nitride powder.
Dependencies are inferred from the claim text.