Apparatus and method for controlling oscillation output of magnetron
AssigneeFujitsu Limited
InventorShozo Noda
Life of this patent
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Abstract
An apparatus for controlling an oscillation output of a magnetron includes a switch circuit controlled of ON/OFF states thereof by a pulse signal, a rectifying circuit for supplying microwave power pulses to the magnetron, and a transformer having a primary side and a secondary side. The primary side has a first terminal and a second terminal, where the first terminal is connected to an A.C. power supply, the second terminal is connected to the switch circuit. The secondary side is connected to the rectifying circuit. The switch circuit is turned ON/OFF by the pulse signal so that a duty factor of the microwave power pulses output from the rectifying circuit and a repetition frequency of the duty cycle thereof become constant.
Claims17
An apparatus for controlling an oscillation output of a magnetron, comprising:
- a switch circuit controlled of ON/OFF states thereof by a pulse signal;
- a rectifying circuit supplying microwave power pulses to said magnetron;
- and
- a transformer having a primary side and a secondary side, said primary side having a first terminal and a second terminal, said first terminal being coupled to an A.C. power supply, said second terminal being coupled to said switch circuit, said secondary side being coupled to said rectifying circuit,
- said switch circuit being controlled of the ON/OFF states thereof by said pulse signal so that a duty factor of the microwave power pulses output from said rectifying circuit and a repetition frequency of the duty cycle thereof become constant.
A plasma processing method comprising the steps of:
- (a) supplying microwave power to a magnetron from a rectifying circuit;
- (b) controlling an oscillation output of the magnetron by controlling ON/OFF states of a switch circuit by a pulse signal so that a duty factor of the microwave power pulses output from the rectifying circuit and a repetition frequency of the duty cycle thereof become constant;
- and
- (c) generating plasma using the magnetron.
Dependencies are inferred from the claim text.