Method for producing fused silica with low sodium ion contamination level
AssigneeCorning Incorporated
InventorsDaniel R. Sempolinski, Latha I. Swaroop
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Abstract
A method of producing a fused silica product comprising introducing a silicon-containing, organometallic compound into a flame to form molten silica particles, and collecting the molten silica particles in a furnace having a crown and cup such that a fused silica product is obtained, wherein at least the furnace crown is formed from a porous, fired, zircon refractory having a sodium ion content of less than 30 ppm. The fused silica product produced by the method has a sodium ion contamination level below 100 parts per billion.
Claims5
A method of producing a fused silica product comprising introducing a silicon-containing, organometallic compound into a flame to form molten silica particles, and collecting the molten silica particles in a furnace having a crown and cup such that a fused silica product is obtained, the improvement comprising constructing at least the furnace crown from a porous, fired, zircon refractory having a sodium ion content of less than 30 ppm such that said fused silica product has a sodium ion contamination level below 100 parts per billion.
A method of producing a fused silica boule having a sodium ion content, of less than 100 ppb in a substantial portion thereof which comprises constructing a furnace having crown and cup portions, the crown and cup portions being constructed from a porous, fired, zircon refractory having a sodium ion content of less than 30 ppm, introducing a silicon-containing, organometallic, compound into a flame to form molten silica particles, collecting the molten silica particles within the furnace and depositing the particles in the cup portion of the furnace to form a boule.
Dependencies are inferred from the claim text.