Multiple thin film sensor system

Abstract

A plurality of flow sensors are fabricated using thin film deposition techniques on a single substrate. The deposition is performed to provide the proper physical relationship of the individual sensors. In the preferred embodiment, the sensors are thermoresistive elements, which change resistance in response to the flow of air across the individual elements. The change in temperature of the air flow in relation to the ambient provides an indication of the flow and may be used to determine the extent of the flow. The resulting multiple sensor structure may be effectively used as a respiration detector by positioning a different sensor element at each of the airflow orifices (i.e. two nostrils and mouth) of a patient. The individual sensor elements may be electrically coupled in series.

Dependencies are inferred from the claim text.