Device for pulling silicon single crystal

A device for pulling a silicon single crystal in an atmosphere of inert gas by the Czochralski method, which device comprises:

• a crucible form accommodating a molten silicon mass,
• a heater disposed around the periphery of said crucible,
• an outer member forming a pulling chamber for accommodating said crucible,
• an inert gas inlet part disposed in the upper part of said pulling chamber, and
• an inert gas outlet part separated from said inert gas inlet part in the same upper part of said pulling chamber;
• wherein
• said same upper part is a continuous surface, and said inert gas flows radially from said inlet part to said gas outlet part, and
• wherein said continuous surface is flat.

A device for pulling a silicon single crystal in an atmosphere of inert gas by the Czochralski method, which device comprises:

• crucible form accommodating a molten silicon mass,
• heater disposed around the periphery of said crucible,
• an outer member forming a pulling chamber for accommodating said crucible,
• an inert gas inlet part disposed in the upper part of said pulling chamber, and
• an inert gas outlet part separated from said inert gas inlet part in the same upper part of said pulling chamber;
• wherein
• said same upper part is a continuous surface, and said inert gas flows radially from said inlet part to said gas outlet part, and
• wherein said inert gas inlet part is disposed at the center of the upper part of said pulling chamber and said inert gas outlet part is disposed at a corner of the upper part of said pulling chamber.

A device for pulling a silicon single crystal in an atmosphere of inert gas by the Czochralski method, which device comprises:

• a crucible form accommodating a molten silicon mass,
• a heater disposed around the periphery of said crucible,
• an outer member forming a pulling chamber for accommodating said crucible,
• an inert gas inlet part disposed in the upper part of said pulling chamber, and
• an inert gas outlet part separated from said inert gas inlet part in the same upper part of said pulling chamber;
• wherein
• said same upper part is a continuous surface, and said inert gas flows radially from said inlet part to said gas outlet part, and
• wherein said inert gas outlet parts disposed severally at two or more portions of said pulling chamber are positioned symmetrically relative to the axis of said pulling chamber so as to give rise to a plurality of pairs of gas outlet parts.

A device for pulling a silicon single crystal in an atmosphere of inert gas by the Czochralski method, which device comprises:

• a crucible form accommodating a molten silicon mass,
• a heater disposed around the periphery of said crucible,
• an outer member forming a pulling chamber for accommodating said crucible,
• an inert gas inlet part disposed in the upper part of said pulling chamber, and
• an inert gas outlet part separated from said inert gas inlet part in the same upper part of said pulling chamber;
• wherein
• said same upper part allows unobstructed gas flow from said inlet to said outlet, and
• wherein said inert gas inlet part is disposed at the center of the upper part of said pulling chamber and said inert gas outlet part is disposed at a corner of the upper part of said pulling chamber.

A device for pulling a silicon single crystal in an atmosphere of inert gas by the Czochralski method, which device comprises:

• a crucible form accommodating a molten silicon mass,
• a heater disposed around the periphery of said crucible,
• an outer member forming a pulling chamber for accommodating said crucible,
• an inert gas inlet part disposed in the upper part of said pulling chamber, and
• an inert gas outlet part separated from said inert gas inlet part in the same upper part of said pulling chamber;
• wherein
• said same upper part allows unobstructed gas flow from said inlet to said outlet, and
• wherein said inert gas outlet parts disposed severally at two or more portions of said pulling chamber are positioned symmetrically relative to the axis of said pulling chamber so as to give rise to a plurality of pairs of gas outlet parts.