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US 5,394,755 AGranted
Flow quantity test system for mass flow controller
AssigneeCkd Corporation
InventorsYoshihisa Sudo, Minoru Ito
Life of this patent
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AssigneeCkd Corporation
InventorsYoshihisa Sudo, Minoru Ito
Estimating the term…
In a flow quantity test system for a mass flow controller, a gas source for measurement is provided to supply gas for measurement. A cutoff valve for start of measurement is connected at its inlet port to the gas source for measurement and is connected at its outlet port to an inlet port of the mass flow controller. The cutoff valve for start of measurement is opened to flow the gas for measurement therethrough and closed to block the flow of the gas for measurement therethrough. A pressure gauge is provided to detect pressure of the gas for measurement appearing at the outlet port side of the cutoff valve for start of measurement. A microcomputer is provided to close the process gas cutoff valve and open the cutoff valve for start of measurement to change pressure detected by the pressure gauge. The microcomputer further closes the cutoff valve for start of measurement after pressure detected by the pressure gauge has reached predetermined pressure and measures lowering of pressure detected by the pressure gauge dependent on lapse of time after closing of the cutoff valve for start of measurement. Thereafter the microcomputer tests measuring precision of the mass flow controller in accordance with the measured lowering of the detected pressure.
A flow quantity test system for a mass flow controller provided within a gas system wherein a process gas cutoff valve is opened to supply a process gas from a process gas source to said mass flow controller such that said mass flow controller applies the process gas from said process gas cutoff valve therethrough to a process chamber and is closed to block the supply of the process gas to said mass flow controller, the flow quantity test system comprising:
A method of testing actual flow quantity of a mass flow controller provided within a gas system wherein a process gas cutoff valve is between a process gas source, which contains a process gas, and said mass flow controller, said process gas cutoff valve controlling flow of the process gas into said mass flow controller, and said mass flow controller controlling flow of the process gas into a process chamber, comprising:
A method for determining performance of a mass flow controller in a gas system, wherein a process gas flows through the mass flow controller to a process chamber, and a separate measuring gas from a separate measuring gas source flows through the mass flow controller to a process chamber during a testing phase, comprising:
Dependencies are inferred from the claim text.