Spinal sensor with integrated optics to detect chemical substances
AssigneeCommissariat a l'Energie Atomique
InventorSerge Valette
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Abstract
The invention concerns a sensor with integrated optics, to detect chemical substances, including a double spiral interlaced with wave guides and integrated on a substrate (13) receiving the signal of a light source (14) through a first optical component (15) able to separate into two portions the light intensity emitted by the source and sending output signals onto at least one detector (17) through a second optical component (16), the first of the two guides (11) being a reference guide isolated from the influence of the substance to be measured, and the second (12) being a measuring guide affected by the substance to be measured.
Claims14
Sensor with integrated optics to detect chemical substances, which includes a double spiral interlaced with two wave guides and integrated on a substrate wherein a first of the two wave guides is a reference guide isolated from the influence of the substance to be measured, a second wave guide being a measuring guide affected by the substance to be measured, said sensor receives a signal from a light source through a first optical component enabling the light intensity emitted by the source to be separated into two portions and sends outgoing signals onto at least one detector through a second optical component.
Sensor according to any one of the preceding claims, wherein the luminous wave guides are embodied in one of the Si/SiO.sub.2 /Si.sub.3 N.sub.4 /SiO.sub.2 (OIS1) and Si/SiO.sub.2 /SiO.sub.2 high index/SiO.sub.2 (OIS2) structures.
Dependencies are inferred from the claim text.