US 5,394,100 A · Probe system with automatic control of contact pressure and probe alignment

Abstract

A probe system for probing a device under test (DUT) includes a DUT support chuck for holding the DUT. A plurality of flexible probe needles are positioned along a "Z" axis that extends orthogonally from the surface of the DUT. Each probe needle is movable with respect to the DUT support chuck. A motor provides for relative movement, at least along the Z axis, between the probe needles and the DUT support chuck. A variable focus imaging system is positioned along the Z axis and provides image signals to a control processor. The control processor causes the variable focus imaging system to image the surface of the DUT and at least one probe needle. The control processor is responsive to a determined distance between focal planes containing the DUT surface and probe needle to cause the motor to move the probe needle and the DUT surface into physical engagement. The motor is further controlled to provide a relative movement distance between the probe needle and the DUT that is greater than the determined distance between the focal planes, thereby enabling a predetermined contact pressure to be obtained.

Claims8

Dependent claims

A probe system for probing a device under test (DUT) comprising:

DUT support means;
a plurality of probe needles, each said probe needle movable with respect to said DUT support means, said probe needles positioned adjacent a surface of a said DUT and along a Z-dimension axis that extends orthogonally from said surface;
motor means for providing relative movement at least along said Z axis between each said probe needle and said DUT support means;
variable focus imaging means positioned along said Z axis;
and
control means for causing said variable focus imaging means to provide images of both said surface of said DUT and at least a said probe needle, said control means responsive to a determined distance between focal planes of said images to cause said motor means to move said probe needle and said DUT surface into physical engagement, said motor means controlled to provide a distance of relative movement between said probe needle and said DUT surface that is greater than said determined distance between focal planes of said images, thereby creating a predetermined contact pressure between said probe needle and said DUT surface.

3 more elements

A probe system for probing a device under test (DUT) comprising:

DUT support means;
a group of probe needles, all said group of probe needles movable as an entity with respect to said DUT support means, and positioned adjacent a surface to be probed of a said DUT and along a Z-axis that extends orthogonally from said surface;
motor means for providing relative movement at least along said Z-axis between said probe needles and said DUT support means;
variable focus imaging means positioned along said z-axis;
and
control means for causing said variable focus imaging means to provide images of said surface of said DUT and at least a said probe needle of said group of probe needles, said control means responsive to a determined distance between focal planes of said images to cause said motor means to move said group of probe needles and said DUT surface into physical engagement, said motor means controlled to provide a relative movement distance between said group of probe needles and said DUT surface that is greater than said determined distance between said focal planes, thereby creating a predetermined contact pressure between said group of probe needles and said DUT surface.

3 more elements

Dependencies are inferred from the claim text.

Probe system with automatic control of contact pressure and probe alignment

Life of this patent

Probe system with automatic control of contact pressure and probe alignment

Life of this patent

Abstract

Claims8