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US 5,393,986 AGranted
Ion implantation apparatus
AssigneeSharp Kabushiki Kaisha
InventorsAtsushi Yoshinouchi, Tatsuo Morita, Shuhei Tsuchimoto
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Abstract
An ion implantation apparatus having a plasma source for generating ions, an ion accelerator for accelerating the generated ions, and a substrate holder provided on a position which the accelerated ions irradiate, wherein a current density of a desired kind of ions is measured by an electromagnetic ion energy analyzer having an electric field and a magnetic field, thereby controlling a dose of the ions.
Claims5
An ion implantation apparatus comprising:
- a plasma source for generating ions;
- an ion accelerator for accelerating the ions;
- a substrate holder provided on a position which the accelerated ions irradiate;
- and
- an energy analyzing means, disposed adjacently to the substrate holder so that some of the accelerated ions enter the energy analyzing means, for separating a desired kind of ions from the entering ions and measuring a number of the desired kind of the ions.
2 more elements
An ion implantation apparatus comprising:
- a plasma source for generating ions;
- an ion accelerator for accelerating the ions;
- a substrate holder provided on a position which the accelerated ions irradiate;
- an electromagnetic ion energy analyzer, disposed adjacently to the substrate holder so that some of the accelerated ions enter the electromagnetic ion energy analyzer, for separating a desired kind of ions from the entering ions and measuring a number of the desired kind of ions, and
- a charge collector for measuring a number of the ions the amount of which is practically equal to that of the ions entering the electromagnetic ion energy analyzer per unit time,
- the electromagnetic ion energy analyzer generating an electric field and a magnetic field having components vertical to an incident direction of the ions entering the electromagnetic ion energy analyzer, and having a detection area including different points at which the ions having passed through the electric field and the magnetic field arrive depending upon a mass and a charge of the ions.
3 more elements
Dependencies are inferred from the claim text.