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US 5,393,985 AGranted
Apparatus for focusing an ion beam
AssigneeShimadzu Corporation
InventorsYasuhiro Yamakage, Shinji Nagamachi
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AssigneeShimadzu Corporation
InventorsYasuhiro Yamakage, Shinji Nagamachi
Estimating the term…
A focused ion beam apparatus which includes an ion source, an extraction electrode for extracting ion beams from the ion source, a condenser lens for focusing the ion beam, a mass spectrometer for separating a desired ion species from the extracted ion beams, a target stage adapted to support a target, deflection electrodes for deflecting the ion beam taken from the mass spectrometer, and guiding same to the target on the stage, wherein the condenser lens group includes an objective lens located immediately before the target stage, and including a decelerating field circuit for forming a decelerating field between the target stage and the outermost electrode of the objective lens, the deflection electrode having a two-stage structure consisting of a first and second group of deflection electrodes in the advancing direction of ion beam, wherein the ion beam deflected by the deflection electrodes is caused to pass through the center of the objective lens irrespective of the amount of beam deflection.
A focused ion beam apparatus which comprises an ion source, an extraction electrode for extracting an ion beam from the ion source, a condenser lens for focusing the ion beam, a mass spectrometer for separating a desired ion species from the extracted ion beam, a target stage adapted to support a target, deflection electrodes for deflecting the ion beam taken from the mass spectrometer, and guiding same to the target on the stage, and an objective lens located immediately before the target stage, and comprising a decelerating field circuit for forming a decelerating field between the target stage and an outermost electrode of the objective lens, the deflection electrodes having a two-stage structure consisting of a first and second group of deflection electrodes in the advancing direction of the ion beam, wherein the ion beam deflected by the deflection electrodes is caused to pass through the center of the objective lens irrespective of the amount of beam deflection.
A focused ion beam apparatus which comprises an ion source, an extraction electrode for extracting an ion beam from the ion source, a plurality of lenses for focusing the ion beam, a mass spectrometer for separating a desired ion species from the extracted ion beam, a target stage adapted to support a target, a beam scanning means for determining an ion beam incident position of the ion beam separated by the mass spectrometer, means for forming a decelerating field immediately before the target stage, an SIM image detector located adjacent to the target stage, a videorizing means for visualizing an SIM image on the basis of an output from the detector and information from the beam scanning means, an input unit for inputting data on the shape and position of a pattern to be deposited by the incident ion beam by reference to the SIM image formed by the videorizing means, and a compensation means for supplying a control signal to the beam scanning means after the input is appropriately compensated, the compensation means being capable of compensating the content of the input in response to a beam path deviation occurring when a decelerating field is formed, against when no decelerating field is formed.
Dependencies are inferred from the claim text.