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AssigneeHitachi, Ltd.
InventorsAkimitsu Okura, Mitsugu Sato, Osamu Yamada, Yasushi Nakaizumi, Eiichi Hazaki
Estimating the term…
A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.
A charged particle beam apparatus, comprising:
A charged particle beam apparatus wherein a specimen is irradiated with a charged particle beam so as to generate an information signal characteristic of the specimen to thereby produce an image thereof, the charged particle beam apparatus comprising:
A method of operating a charged particle beam apparatus wherein a specimen is irradiated with a charged particle beam and a memory is provided for storing operating conditions of the charged particle beam apparatus which are associated with identification information for specifying the specimen, comprising the steps of:
A method of operating a charged particle beam apparatus wherein a specimen is scanned with a charged particle beam so as to generate an information signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated information signal and a memory is provided for storing operating conditions of the charged particle beam apparatus which are associated with identification information for specifying the specimen, comprising the step of:
Dependencies are inferred from the claim text.