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AssigneeElectronics and Telecommunications Research Institute
InventorsGyeong-Lyong Park, Sin-Chong Park, Hyung-Moo Park
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A method is disclosed for manufacturing a very fast micro light valve of the type used to control the passage of light through a pixel. The method comprises preparing a substrate, which can be made of glass, and forming transparent electrodes on the main surface of the substrate. Next an insulating layer is deposited on the substrate and a first sacrificial layer is formed on the insulating layer. A pattern shifting element layer is formed on the first sacrificial layer and a second sacrificial layer is formed on the substrate and provided with a shifting element layer. After portions of the sacrificial layers are removed by etching to form a frame contact portion, a patterned frame layer is formed on the frame contact portion. Then a frame and a shifting element capable of moving in the frame under an applied external electrostatic force are formed by removing the remaining sacrificial layers.
A method for manufacturing a micro light valve which is corresponding to each of pixels for display and which passes or shuts a light beam by electrostatic force to display images, comprising the steps of:
The method according to 3, wherein said transparent is made of an ITO film, and each of said selection and common electrodes is made of chromium.
A method for manufacturing a micro light valve which is corresponding to each of pixels for display and which passes or shuts a light beam by electrostatic force to display images, comprising the steps of:
The method according to 11, wherein said transparent is made of an ITO film, and each of said selection and common electrodes is made of chromium.
Dependencies are inferred from the claim text.