Method for forming multilayer indium bump contacts
AssigneeGrumman Aerosace Corp.
InventorsWei Koh, Wayne D. Kuipers
Life of this patent
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AssigneeGrumman Aerosace Corp.
InventorsWei Koh, Wayne D. Kuipers
Estimating the term…
A method for forming multilayer bump contacts for use in flip-chip bump bonding and the like. The method comprises applying a base layer to a substrate and then applying a malleable conductive layer to the base layer. In a first embodiment, individual bump contacts are formed by removing portions of the base layer and malleable layer such that a plurality of bump contacts are formed. In a second embodiment a photoresist and etching process is used. The need to precisely align a mark to define the position of the malleable layer relative to the base layer is eliminated since the positions of the malleable layer and the base layer are defined simultaneously in both embodiments. Thus, the number of process steps is reduced, yield is increased, and alignment accuracy is improved.
A method for fabricating an array of high density, multilayer electrical contacts for interfacing an array of infrared detectors and signal processing modules, the method comprising the steps of:
Dependencies are inferred from the claim text.