Piezoelectric semiconductor
AssigneeNGK Insulators, Ltd.
InventorsYuji Asai, Osamu Imai
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Abstract
A piezoelectric semiconductor is a single crystal composed mainly of ZnO having properties such as electrical conductivity of 10.sup.-11 .about.10.sup.-3 1/.OMEGA..multidot.cm suitable for use as an acoustoelectric element, by adding a given amount of H.sub.2 O.sub.2 to the alkali solvent, or by using NH.sub.4 OH in the alkali solvent, or by doping the ZnO single crystal with Li or a trivalent metal. The piezoelectric semiconductor can be suitably used as a ultrasonic transducer material of acoustoelectric type and can also be used as a material for ultrasonic amplification, an surface acoustic wave filter, a piezoelectric transducer, a fluorescent material for emitting a low-velocity electron beam, etc.
Claims8
A piezoelectric semiconductor for use as an acoustoelectric element comprising a single crystal composed mainly of ZnO, said single crystal having an electrical conductivity of 10.sup.-11 .about.10.sup.-6 1/.OMEGA..multidot.cm, a carrier mobility of at least 30 cm.sup.2 /V.multidot.sec, and a variation in electrical conductivity in said single crystal of 10.sup.2 1/.OMEGA..multidot.cm or smaller.
A piezoelectric semiconductor for use as an acoustoelectric element comprising a single crystal composed mainly of ZnO, said single crystal having an electrical conductivity of 10.sup.-6 .about.10.sup.-3 1/.OMEGA..multidot.cm, a carrier mobility of at least 30 cm.sup.2 /V.multidot.sec, and a variation in electrical conductivity in said single crystal of 10.sup.2 1/.OMEGA..multidot.cm or smaller.
Dependencies are inferred from the claim text.