Method of ashing
AssigneeSony Corporation
InventorsJunichi Sato, Shingo Kadomura
Life of this patent
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Abstract
A method of ashing comprises the steps of cooling the work to a temperature of 0.degree. C. or therebelow and causing ashing of a photo-resist on the work. An apparatus for ashing comprises a cooling ashing chamber, a heating ashing chamber, and a gate valve provided between the two chambers. The method and apparatus as noted solves prior art problems and permits photo-resist which has heretofore been difficult to remove to be removed as well and readily and with satisfactory productivity.
Claims5
A method of ashing a photoresist film on a work, comprising the steps of:
- cooling the work down to a temperature of about 0.degree. C. or therebelow, and
- then heating the work to ash the photo-resist film.
A method of ashing a photoresist film on a work, comprising the steps of
- ashing the photo-resist film while cooling the work at a temperature of about 0.degree. C. or therebelow;
- and
- then increasing the temperatures during the ashing steps to remove the photo-resist.
A method of ashing a photoresist film on a work using an apparatus for ashing comprising a first ashing chamber for cooling said work to a temperature of about 0.degree. C. or therebelow, a second ashing chamber for heating said work, and a gate valve provided between said first and second ashing chambers, said method comprising a step of ashing said photoresist film on said work in said individual ashing chambers alternately at least once by transferring said work through said gate valve from one chamber to the other.
A method of ashing a photoresist film on a work comprising the steps of using an apparatus for ashing comprising:
- a first cooling ashing chamber for cooling said work to a temperature of 0.degree. C. or therebelow, a second heating ashing chamber for heating said work, and a gate valve provided between said first and second ashing chambers, and using the cooling ashing chamber as a heating ashing chamber and the heating ashing chamber as a cooling ashing chamber, thereby removing by-product generated in the ashing chamber used as the cooling ashing chamber.
Dependencies are inferred from the claim text.