Detector for force, acceleration or magnetism with respect to components in multi-dimensional directions

A force detector for detecting components in multi-dimensional directions of force in an XYZ three-dimensional coordinate system, comprising:

• a fixed substrate having a fixed surface extending along substantially an XY plane,
• a displacement substrate having a displacement surface opposite to the fixed surface and extending along substantially the XY plane,
• a first capacitance element formed by a pair of electrodes provided so that they are opposite to each other on the fixed surface and the displacement surface in the first quadrant of the XY plane,
• a second capacitance element formed by a pair of electrodes provided so that they are opposite to each other on the fixed surface and the displacement surface in the second quadrant of the XY plane,
• a third capacitance element formed by a pair of electrodes provided so that they are opposite to each other on the fixed surface and the displacement surface in the third quadrant of the XY plane,
• a fourth capacitance element formed by a pair of electrodes provided so that they are opposite to each other on the fixed surface and the displacement surface in the fourth quadrant of the XY plane,
• first detection means for detecting a force component in the X-axis direction on the basis of a difference between a sum of a capacitance value of said first capacitance element and a capacitance value of said fourth capacitance element and a sum of a capacitance value of said second capacitance element and a capacitance value of said third capacitance element when the force in the X-axis direction is exerted on a predetermined working point which causes a displacement of said displacement substrate, and
• second detection means for detecting a force component in the Y-axis direction on the basis of a difference between a sum of a capacitance value of said first capacitance element and a capacitance value of said second capacitance element and a sum of a capacitance value of said third capacitance element and a capacitance value of said fourth capacitance element when the force in the Y-axis direction is exerted on said working point.