Capacitor compatible with high dielectric constant materials having two independent insulative layers and the method for forming same

A capacitor having a storage node electrode, comprising:

• a) a first electrically insulative region overlying a substrate;
• b) a plug region having a bottom surface, a top surface, and a sidewall surface, said bottom surface contacting said substrate, said sidewall surface adjacent to said first electrically insulative region, and said top surface recessed from a top surface of said first electrically insulative region;
• c) a diffusion barrier region overlying said plug region, said diffusion barrier region having a top surface, said top surface of said diffusion barrier region substantially planar to said top surface of said first electrically insulative region;
• d) a second electrically insulative region overlying at least a portion of said first electrically insulative region;
• and
• e) an protective region selected in order to prohibit oxidation of said storage node electrode, said protective region overlying and adjacent to at least a portion of said top surface of said diffusion barrier region, said diffusion barrier region minimizing a diffusion of atoms between said plug region and said protective region, said protective region having an upper sidewall surface and a lower sidewall surface, at least said lower sidewall surface adjacent to said second electrically insulative region and overlying said first electrically insulative region, at least said protective region forming the storage node electrode of the capacitor.