Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits
AssigneeApplied Materials, Inc.
InventorsKenneth S. Collins, John Trow, Craig A. Roderick, Jay D. Pinson, II, Douglas A. Buchberger, II, Robert P. Hartlage, Viktor Shel
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Abstract
The disclosure discusses impedance matching circuits based on parallel-resonant L-C tank circuits, and describes a low-loss design for an adjustable inductance element suitable for use in these parallel tank circuits. The application of an impedance matching circuit to a plasma process is also disclosed; in this context, a local impedance transformation circuit is used to improve power transfer to the plasma source antenna.
Claims7
A variable inductance element for generating an inductive reactance to a high-frequency electrical signal current flowing between a first and a second signal terminal, comprising
- a rod-type core manufactured of a material having a non-linear relationship between magnetic field intensity H and magnetic flux density B,
- control means for generating a low-frequency electrical control current,
- a first control winding bearing said control current and generating magnetic fields in said core, and
- a signal coil coupled between said first and second signal terminals bearing said high-frequency electrical signal current and generating magnetic fields in said core.
Dependencies are inferred from the claim text.