Photodetector array having high pixel density
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorsCarmen I. Huber, Tito E. Huber, Tak-Kin Chu, Nicholas Caviris
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Abstract
Photoconductive semiconductor material is injected into narrow and closely paced cylindrical channels in an insulating matrix plate to form pixel elements of a high resolution photodetector array. A transparent conductive layer is deposited on one surface of the photoconductor array while light reflecting pads are formed on the elements at the opposite surface. Subsequently, a layer of light modulating material and a transparent conductive layer are deposited on the opposite surface to obtain a high resolution spatial light modulator.
Claims5
In a photodetector device including an electrically insulating matrix and an array of photoconductive pins embedded therein, said pins occupying channels formed in the matrix extending in spaced relation to each other from an interface surface of the matrix to provide a pixel density substantially exceeding 1,000,000 elements per square centimeter, each of said pins having terminal ends within said channels closely spaced from the interface surface, and light reflecting pads occupying the channels between said terminal ends of the pins and the interface surface of the matrix.
In an optically addressed spatial light modulator having a light modulating element, photosensing means for converting light impinging thereon into electrical signals and a mirror layer interfaced between the photosensing means and the light modulating element, said photosensing means comprising an electrically insulating matrix and an array of photoconductive semiconductor pins embedded therein, said pins extending through the matrix in spaced relation to each other to provide a pixel density substantially exceeding, 1,000,000 per square centimeter, each of said pins having terminal ends spaced by the mirror layer from the light modulating element, said mirror layer being formed by reflecting pads in contact with the terminal ends of the pins.
Dependencies are inferred from the claim text.