Process of making chalcopyrite structure semiconductor film
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTakayuki Negami, Mikihiko Nishitani, Shigemi Kohiki, Takahiro Wada
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Abstract
A I-III-VI.sub.2 chalcopyrite semiconductor film containing a Group VII element as a dopant, and methods to produce such a chalcopyrite film are provided. The chalcopyrite film of the present invention has stoichiometric composition, and electrical characteristics such as p-n conduction type, carrier concentration and the like are controlled.
Claims11
A process of producing a chalcopyrite semiconductor film comprising:
- depositing a Group I-III-VI.sub.2 chalcopyrite compound film on a substrate while evaporating onto said substrate a Group VII element to obtain a I-III-VI.sub.2 chalcopyrite compound film containing said Group VII element therein as a dopant.
A process of producing a chalcopyrite semiconductor film comprising the steps of:
- depositing a Group I-III-VI.sub.2 chalcopyrite compound film on a substrate, and
- heat treating said chalcopyrite compound film in an atmosphere containing a vapor of a Group VII element or its compound to obtain a I-III-VI.sub.2 chalcopyrite compound film containing said Group VII element as a dopant.
A process of producing a chalcopyrite semiconductor film comprising the steps of:
- depositing a Group I-III-VI.sub.2 chalcopyrite compound film on a substrate, and
- heat treating the deposited chalcopyrite compound film in an atmosphere containing a gaseous compound of a Group VII element to obtain a chalcopyrite compound film containing said Group VII element therein as a dopant.
A process of producing a chalcopyrite semiconductor film comprising the steps of:
- depositing a film comprising a Group I element and a Group VII element on a substrate, and
- heat treating said film in an atmosphere containing a vapor of a Group VII element or its gaseous compound and a gaseous compound of a Group VII element to obtain a I-III-VI.sub.2 chalcopyrite compound containing the Group VII element as a dopant.
Dependencies are inferred from the claim text.