Steady-state, glow discharge plasma
AssigneeThe University of Tennessee Research Corporation
InventorsJohn R. Roth, Peter P. Tsai, Chaoyu Liu
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Abstract
A steady-state, glow discharge plasma is generated within the volume between a pair of parallel, insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. The electrodes are located within an enclosure capable of maintaining an atmosphere other than atmospheric air between the electrode surfaces. Space between the electrodes is occupied by a noble gas such as helium, neon, argon, etc. or mixtures thereof.
Claims22
Apparatus to generate and maintain a glow discharge plasma at a pressure of about 1 atmosphere, the apparatus comprising
- a pair of electrically insulated plate electrodes aligned and secured in parallel facing position,
- means for supplying and maintaining a noble gas at a pressure of about one atmosphere in the volumetric space between said plate electrodes, and
- radio frequency amplifier means for generating and maintaining a glow discharge plasma by energizing said electrodes with a potential of 1 to at least 5 KV rms at 1 to 100 KHz.
A method of generating and maintaining a glow discharge plasma at a pressure of about 1 atmosphere within a volumetric space between two parallel plate electrodes energized by radio frequency amplifier means, said method comprising the steps of operating said amplifier means to energize said electrodes with a potential of 1 to at least 5 KV rms at 1 to 100 KHz frequency while charging and maintaining the volumetric space between said electrodes with a noble gas at approximately 1 atmosphere of pressure.
Dependencies are inferred from the claim text.