Two-stage positive displacement pump
AssigneeKNF Neuberger GmbH
InventorErich Becker
Life of this patent
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Abstract
A two-stage positive displacement pump (1) is used in particular to operate in conjunction with a turbomolecular pump (2) that can be placed ahead of it in series. The two-stage positive displacement pump (1) is configured as a hybrid pump (3) that has on the medium-entry side a reciprocating pump (5) with a comparatively large displacement area (6), whereby its piston-cylinder space (7) is sealed off with respect to the crank area (8) by means of a sealing membrane (9). Also as a part of this two-stage positive displacement pump (1) which forms the hybrid pump (3), there is placed in series behind the reciprocating pump (5) a diaphragm pump (10), whose displacement area (11) is noticeably smaller compared to that of the reciprocating pump (5).
Claims10
A multi-stage pump having an output-side positive displacement pump, said multi-stage pump (1) comprising a turbomolecular pump (2), a reciprocating displacement pump (5), and a diaphragm displacement pump (10), said reciprocating pump being connected in series downstream of the turbomolecular pump (2), said reciprocating pump (5) having a piston-cylinder space (7) which is sealed off with respect to a crank area (8) by means of a sealing membrane (9), said diaphragm pump (10) being connected in series downstream of the reciprocating pump (5), and said diaphragm pump having a displacement area (11) which is appreciably smaller than a displacement area (6) of the reciprocating pump (5) .
Dependencies are inferred from the claim text.