Solid state micro-machined mass spectrograph universal gas detection sensor

A solid state mass spectrograph for analyzing a sample gas with multiple gas constituents, said mass spectrograph comprising:

• a semiconductor substrate having an elongated cavity therein with an inlet, a gas ionizing section adjacent said inlet, a mass filter section adjacent said gas ionizing section, and a detector section adjacent said mass filter section, said substrate including apertured partitions dividing said cavity into connected chambers;
• vacuum means differentially evacuating said connected chambers and drawing said sample gas into said cavity through said inlet;
• gas ionizer means formed in said substrate in said gas ionizing section of said cavity and including a solid state electron emitter to which sample gas is drawn by said vacuum means and which generates ionized sample gas, and ion optic means comprising electrodes formed on selected of said apertured partitions and which collimate and accelerate said ionized sample gas;
• a Wien filter generating orthogonal electric and magnetic fields in said mass filter section of said cavity which disperse said constituents of ionized sample gas by mass/charge ratio into a dispersion plane;
• and
• a linear detector array in said detector section of said cavity arranged in said dispersion plane simultaneously detecting a plurality of said multiple gas constituents.