Optical device and a method of manufacture thereof
AssigneeLucas Industries public limited company
InventorsAlan J. Jacobs-Cook, Peter E. M. Frere, Mark E. C. Bowen
Life of this patent
Estimating the term…
Abstract
A block of monocrystalline silicon oriented so as to have a body surface aligned in a {110} crystallographic plane is selectively etched so as to define a groove for receiving an optical waveguide and a reflecting surface facing the groove. The groove is aligned with a <110> crystallographic axis. The reflecting surface is in a {100} crystallographic plane. Thus, the groove is parallel to the body surface and the reflecting surface is at 45.degree. to the body surface.
Claims16
An optical device, comprising a body of monocrystalline silicon having a body surface aligned in a {110} crystallographic plane, groove surfaces defining a groove formed in said body surface for containing an optical waveguide, said groove having an end portion having a longitudinal axis substantially along a <110>crystallographic axis, and an optical reflector facing said end portion of said groove and having an optically reflective surface in a {100} crystallographic plane.
A method of making an optical device, comprising:
- etching a body of monocrystalline silicon having a body surface aligned in a {110} crystallographic plane to form an optical reflector by revealing an optically reflective surface in a {100} crystallographic plane;
- and forming a groove in said body surface for containing an optical waveguide, said groove having an end portion having a longitudinal axis substantially aligned with a <110>
- crystallographic axis, said optical reflector facing said end portion.
Dependencies are inferred from the claim text.