Liquid crystal device and method for manufacturing same with spacers formed by photolithography
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsMasahiko Sato, Toshimitsu Konuma, Seiichi Odaka, Toshiharu Yamaguchi, Toshio Watanabe, Osamu Aoyagi, Kaoru Tabata, Chizuru Isigaki, Hiroyuki Sakayori, Ippei Kobayashi, Akio Osabe, Shunpei Yamazaki
Life of this patent
Estimating the term…