Piezoelectric device
AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Koji Kimura
Life of this patent
Estimating the term…
Abstract
A piezoelectric device (1) includes an at least locally thin-walled ceramic substrate (2) and at least one piezoelectric transducer (3) on the substrate (2). The piezoelectric transducer (3) includes a lower electrode layer (4), a piezoelectric layer (5) and an upper electrode layer (6) which are sequentially laminated with each other. The piezoelectric layer (5) has a dimension which is sufficient to cover substantially completely the lower electrode layer (4). The piezoelectric layer (5) has at least one edge (7) which protrudes beyond the lower electrode layer (4) and which is at least locally incompletely bonded to the ceramic substrate (2).
Claims12
A piezoelectric device comprising an at least locally thin-walled ceramic substrate and at least one piezoelectric transducer formed on said substrate, said piezoelectric transducer including a first electrode layer, a piezoelectric layer and a second electrode layer which are sequentially laminated with each other, said piezoelectric layer having a dimension which is sufficient to cover substantially completely the first electrode layer, and further having at least one edge in the form of an extension which protrudes beyond said first electrode layer and which is at least locally incompletely bonded to the ceramic substrate.
Dependencies are inferred from the claim text.