Gas sensor
AssigneeSiemens Aktiengesellschaft
InventorsWalter Gumbrecht, Wolfgang Schelter, Siegrun Lang
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Abstract
A planar gas sensor, in particular a pCO.sub.2 or pO.sub.2 sensor, has the following components: a pH sensor located on a flat substrate, or at least one noble metal electrode located on the substrate; a reference electrode adjacent to the pH sensor or noble metal electrode; an electrolyte layer, covering the reference electrode and the pH sensor or noble metal electrode, which is delimited by a first polymer structure; and a layer of hydrophobic material, covering the electrolyte layer and a surface region of the substrate outside the first polymer structure, which is delimited by a second polymer structure.
Claims20
A planar gas sensor comprising:
- A substantially flat substrate;
- A pH sensor or at least one noble metal electrode located on the substrate;
- A reference electrode adjacent to the pH sensor or noble metal electrode;
- An electrolyte layer, covering the reference electrode and the pH sensor or noble metal electrode;
- A first polymer structure which delimits the electrolyte layer;
- A layer of hydrophobic material, covering the electrolyte layer and a surface region of the substrate outside the first polymer structure;
- and
- A second polymer structure which delimits the layer of hydrophobic material.
Dependencies are inferred from the claim text.