Device having brush for scrubbing substrate
AssigneesTokyo Electron Limited, Tokyo Electron Kyushu Limited
InventorsKiyohisa Tateyama, Michiaki Matsushita
Life of this patent
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Abstract
A substrate cleaning device comprising a motor for rotating a wafer together with a spin plate, claws for holding the wafer so as to form a space between the spin plate and the wafer, a jet nozzle through which cleaning solution is jetted onto an upper surface of the wafer, a rotating brush for brush-cleaning the upper surface of the wafer, a mechanism for blowing nitrogen gas or pure water onto the lower surface of the wafer, and a mechanism for exhausting the space between the spin plate and the wafer, wherein a solution passage for the solution blowing mechanism and an exhaust passage for the exhaust mechanism are formed in a drive shaft of the motor and communicated with the space.
Claims15
A substrate scrubbing device comprising:
- means for rotating a substrate together with a spin plate member;
- means for holding the substrate so as to form a space between the spin plate member and a lower surface of the substrate;
- means for applying a cleaning solution onto an upper surface of the substrate;
- means for scrubbing the upper surface of the substrate by a rotating brush;
- and
- means for blowing a fluid onto the lower surface of the substrate;
- wherein a fluid passage for the fluid blowing means is formed in a drive shaft of the rotating means and communicated with the space between the spin plate member and the lower surface of the substrate.
A substrate scrubbing device comprising:
- means for rotating a substrate together with a spin plate member;
- means for holding the substrate so as to form a space between the spin plate member and a lower surface of the substrate;
- means for applying a cleaning solution onto an upper surface of the substrate;
- means for scrubbing the upper surface of the substrate by a rotating brush;
- and
- an auxiliary assembly attached to the holder means to hold the substrate at the time when the spin plate member is started and stopped.
Dependencies are inferred from the claim text.