Flexure structure for stage positioning

An apparatus for positioning an operational member comprising a flexure member, said flexure member comprising:

• a pair of parallel members, said pair of parallel members being substantially parallel and inflexible, one of said pair of parallel members for supporting said operational member;
• and
• four sets of flexible spring members, said four sets of flexible spring members maintaining said pair of parallel members in a spaced parallel relationship and responding to an applied force such that said pair of parallel members move toward or away from each other while maintaining said spaced parallel relationship, each of said four sets of flexible spring members comprising:
• at least two parallel flexible elements, each of said at least two parallel flexible elements having a first end and a second end,
• said first end of each of said at least two parallel flexible elements being disposed proximate one of said pair of parallel members,
• said second end of each of said at least two parallel flexible members extending diagonally from said one of said pair of parallel members in a direction toward the other of said pair of parallel members,
• wherein said second end of each of said at least two parallel flexible elements of a first set of said four sets of flexible spring members connects with a corresponding second end of said at least two parallel flexible elements of a second set of said four sets of flexible spring members, thereby forming a first vertex and defining an included angle;
• wherein said second end of each of said at least two parallel flexible elements of a third set of said four sets of flexible spring members connects with a corresponding second end of said at least two parallel flexible elements of a fourth set of said four sets of flexible spring members, thereby forming a second vertex and defining an included angle;
• wherein said included angle formed at said first vertex and said second vertex is less than 180.degree..

An apparatus for positioning an operational member comprising a first and a second flexure member, each said flexure member comprising:

• a. a pair of parallel members, said pair of parallel members being substantially parallel and inflexible, one of said pair of parallel members for supporting said operational member
• b. four sets of flexible spring members, said four sets of flexible spring members maintaining said pair of parallel members in a spaced parallel relationship and responding to an applied force such that said pair of parallel members move toward or away from each other while maintaining said spaced parallel relationship, each of said four sets of flexible spring members comprising:
• at least two parallel flexible elements, each of said at least two parallel flexible elements having a first end and a second end,
• said first end of each of said at least two parallel flexible elements being disposed proximate one of said pair of parallel members,
• said second end of each of said at least two parallel flexible members extending diagonally from said one of said pair of parallel members in a direction toward the other of said pair of parallel members,
• wherein said second end of each of said at least two parallel flexible elements of a first set of said four sets of flexible spring members connects with a corresponding second end of said at least two parallel flexible elements of a second set of said four sets of flexible spring members, thereby forming a first vertex and defining an included angle;
• wherein said second end of each of said at least two parallel flexible elements of a third set of said four sets of flexible spring members connects with a corresponding second end of said at least two parallel flexible elements of a fourth set of said four sets of flexible spring members, thereby forming a second vertex and defining an included angle;
• wherein said included angle formed at said first vertex and said second vertex is less than 180.degree.,
• said first flexure member being spaced from and parallel to said second flexure member, and frame means, said frame means having a first and second frame member, each of said first and second frame members having a first end and a second end, said first vertex of said first flexure member being fixed to said first end of said first frame member and said second vertex of said first flexure member being fixed to said first end of said second frame member, said first vertex of said second flexure member being fixed to said second end of said first frame member and said second vertex of said second flexure member being fixed to said second end of said second frame member, wherein said frame means simultaneously applies an external force to said first and second flexure members.

In a laser system for optically trapping and manipulating microscopic particles in a particle manipulation chamber the improvement comprising means for positioning said particle manipulation chamber, said means including a flexure member, said flexure member comprising:

• a. a pair of parallel members, said pair of parallel members being substantially parallel and inflexible, one of said pair of parallel members for supporting said particle manipulation chamber,
• b. four sets of flexible spring members, said four sets of flexible spring members maintaining said pair of parallel members in a spaced parallel relationship and responding to an applied force such that said pair of parallel members move toward or away from each other while maintaining said spaced parallel relationship, each of said four sets of flexible spring members comprising:
• at least two parallel flexible elements, each of said at least two parallel flexible elements having a first end and a second end,
• said first end of each of said at least two parallel flexible elements being disposed proximate one of said pair of parallel members,
• said second end of each of said at least two parallel flexible members extending diagonally from said one of said pair of parallel members in a direction toward the other of said pair of parallel members,
• wherein said second end of each of said at least two parallel flexible elements of a first set of said four sets of flexible spring members connects with a corresponding second end of said at least two parallel flexible elements of a second set of said four sets of flexible spring members, thereby forming a first vertex and defining an included angle;
• wherein said second end of each of said at least two parallel flexible elements of a third set of said four sets of flexible spring members connects with a corresponding second end of said at least two parallel flexible elements of a fourth set of said four sets of flexible spring members, thereby forming a second vertex and defining an included angle;
• wherein said included angle formed at said first vertex and said second vertex is less than 180.degree..