Method for fabricating a vertical trench inductor
AssigneeMotorola, Inc.
InventorsLalgudi M. G. Sundaram, Neil Tracht
Life of this patent
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Abstract
A method of forming vertical trench inductor (10) includes providing a layer (11) and forming a plurality of trenches (12) vertically therein. The trenches (12) are filled with a conductive material (16) and etched using a photolithographically defined mask (17). The etching produces a conductive liner (18) covering two sidewalls (13) and a bottom surface (14) of the trench (12). A second conductive layer is formed and patterned to couple the conductive liner (18) covering a sidewall (13) of a first trench (12) to the conductive liner (18) of an opposite sidewall (13) of an adjacent trench (12) to form an inductive coil.
Claims18
A method of fabricating a vertical trench inductor comprising the steps of:
- providing a layer to have a conductive region formed therein;
- forming a plurality of trenches vertically into the layer, wherein each trench has a bottom surface, a first set of opposed sidewalls, and a second set of opposed sidewalls;
- filling each trench with a conductive material;
- etching the conductive material to remove the conductive material from the second set of opposed sidewalls thereby forming a conductive liner covering the bottom surface and the first set of opposed sidewalls;
- covering the conductive liner with a dielectric material;
- and
- forming a conductive interconnect to couple one end of the conductive liner in a first trench to an opposite end of the conductive liner in an adjacent trench.
A method for fabricating a vertical trench inductor comprising the steps of:
- providing a first layer;
- forming a plurality of trenches vertically into the first layer, wherein each trench has a bottom surface, a first set of opposed sidewalls, and a second set of opposed sidewalls;
- depositing a blanket layer comprising a conductive material, wherein the blanket layer fills the plurality of trenches and covers the first layer;
- planarizing the blanket layer so that the conductive material just fills the plurality of trenches;
- forming a mask layer which extends over the first set of opposed sidewalls;
- etching the conductive material to remove the conductive material from the second set of opposed sidewalls thereby forming a conductive liner covering the bottom surface and the first set of opposed sidewalls;
- covering the conductive liner with a dielectric material;
- and
- forming a conductive interconnect to couple one end of the conductive liner in a first trench to an opposite end of the conductive liner in an adjacent trench.
A process for making a vertical trench inductor comprising the steps
- providing an insulating layer;
- forming a plurality of trenches vertically into the insulating layer, wherein each trench has a bottom surface, a first set of opposed sidewalls, and a second set of opposed sidewalls;
- depositing a blanket layer comprising a conductive material, wherein the blanket layer fills the plurality of trenches and covers the insulating layer;
- planarizing the blanket layer so that the conductive material just fills the plurality of trenches;
- forming a mask layer which extends over the first set of opposed sidewalls;
- etching the conductive material to remove the conductive material from the second set of opposed sidewalls thereby forming a conductive liner covering the bottom surface and the first set of opposed sidewalls;
- covering the conductive liner with a dielectric material;
- and
- forming a conductive interconnect to couple one end of the conductive liner in a first trench to an opposite end of the conductive liner in an adjacent trench.
Dependencies are inferred from the claim text.