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US 5,369,280 AGranted
Semiconductor film bolometer thermal infrared detector
AssigneeThe Commonwealth of Australia
InventorKevin C. Liddiard
Life of this patent
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Abstract
A thermal infrared detector comprising a dielectric pellicle suspended over a cavity in a substrate, the pellicle supporting a detector element comprising a heat sensitive semiconductor layer between a pair of thin fim metallic contracts, these being deposited on the pellicle, the cavity being formed by etching and removal of the substrate material through holes or slots in the surface of the substrate.
Claims16
A thermal infrared detector, comprising:
- a heat-sensitive semiconductor layer and a plurality of thin film metallic contacts therefor, deposited onto a dielectric pellicle of low thermal conductivity material suspended over a cavity of a supporting substrate for said pellicle.
A two-dimensional array of thermal infrared detectors, each comprising:
- a heat-sensitive semiconductor layer and a plurality of thin film metallic contacts therefor, deposited onto a dielectric pellicle of low thermal conductivity material suspended over a cavity of a supporting substrate for said pellicle;
- said substrate for each said detector being a corresponding portion of an integral wafer of substrate material.
Dependencies are inferred from the claim text.