Apparatus for solid surface analysis using X-ray spectroscopy

An apparatus for solid surface analysis, comprising:

• a vacuum chamber means for containing a sample to be analyzed;
• X-ray generation means for irradiating X-rays onto a surface of the sample contained in the vacuum chamber means;
• energy dispersive X-ray detector means for detecting X-ray fluorescence emitted from the surface of the sample excited by the X-rays from the X-ray generating means;
• diffracted X-ray detector means for detecting the X-rays diffracted by the surface of the sample excited by the X-rays from the X-ray generation means;
• and
• a connection means for connecting the energy dispersive X-ray detector means to the vacuum chamber means, having one end connected to the vacuum chamber means, another end capable of detachably attaching the energy dispersive X-ray detector means, and a vacuum pump for creating a vacuum state in an interior of the connection means without affecting a vacuum state inside the vacuum chamber means.

An apparatus for solid surface analysis, comprising:

• a vacuum chamber means for containing a sample to be analyzed;
• energy particle beam generation means for irradiating energy particle beam onto a surface of the sample contained in the vacuum chamber means;
• energy dispersive X-ray detector means for detecting X-ray fluorescence emitted from the surface of the sample excited by the energy particle beam from the energy particle beam generation means;
• and
• connection means for connecting the energy dispersive X-ray detector means to the vacuum chamber means, having one end connected to the vacuum chamber means, another end capable of detachably attaching the energy dispersive X-ray detector means, and a vacuum pump for putting an interior of the connection means in a vacuum state without affecting a vacuum state inside the vacuum chamber means.