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US 5,366,587 AGranted
Process for fabricating micromachines
AssigneeSumitomo Electric Industries, Ltd.
InventorsMinoru Ueda, Michitomo Iiyama
Life of this patent
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Abstract
A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and selectively removing the machine parts layer and the sacrificial layers so as to leave the machine element.
Claims20
A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of:
- (a) successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and
- (b) partially removing said sacrificial layers and said machine parts layers so as to leave said machine element.
Dependencies are inferred from the claim text.