Apparatus for clean transfer of objects
AssigneeTDK Corporation
InventorsTetsuo Takahashi, Eisaku Miyauchi, Toshihiko Miyajima, Hideaki Watanabe
Life of this patent
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Abstract
A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the first transfer port. The first connecting member is provided with at least an exterior portion. A second vaccum chamber includes a second transfer port, a second shutter for opening and closing the second transfer port, and a second connecting member surrounding the second transfer port. The second connecting member has at least an exterior portion. A closed space is formed between the first and second connecting members, so that the first and second shutters are movable within the closed space.
Claims11
A clean transfer system, comprising:
- a first vacuum chamber having a first transfer port, a first movable shutter for opening and closing said first transfer port, a first connecting member surrounding said first transfer port, said first connecting member having at least an exterior portion;
- a second vacuum chamber having a second transfer port, a second movable shutter for opening and closing said second transfer port, a second connecting member surrounding said second transfer port, said second connecting member having at least an exterior portion;
- means for moving said first and second shutters so as to open or close said first and second transfer ports;
- and
- said first and second connecting members having at least a connected position, in said connected position a closed space being formed between said first and second connecting members, so that said exterior portions of said first and second connecting members are separated by said closed space and said first and second shutters are movable within said closed space.
Dependencies are inferred from the claim text.