Method of producing sheets of crystalline material and devices made therefrom
AssigneeMassachusetts Institute of Technology
InventorsCarl O. Bozler, John C.C. Fan, Robert W. McClelland
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Abstract
A method of producing sheets of crystalline material is disclosed, as well as devices employing such sheets. In the method, a growth mask is formed upon a substrate and crystalline material is grown at areas of the substrate exposed through the mask and laterally over the surface of the mask to form a sheet of crystalline material. This sheet is optionally separated so that the substrate can be reused. The method has particular importance in forming sheets of crystalline semiconductor material for use in solid state devices.
Claims6
A method of producing an integrated circuit device in a single crystal semiconductor material comprising:
- forming a thin-film of single crystal semiconductor material over an insulating layer and a first substrate;
- attaching a second substrate to a surface of the thin-film;
- separating the thin-film from the first substrate to provide an exposed surface under the thin film and the second substrate;
- attaching the thin-film and the second substrate to a third substrate on the exposed surface;
- and
- separating the thin-film and the third substrate from the second substrate, the thin-film having an integrated circuit device formed therein that is attached to the third substrate with an adhesive layer.
A method of producing an integrated circuit device in a single crystal silicon material comprising:
- forming a thin-film of single crystal silicon material over a silicon dioxide layer and a first substrate;
- attaching a second substrate to a surface of the single crystal silicon material with an adhesive;
- separating the single crystal silicon material from the first substrate to provide an exposed surface under the single crystal silicon material and the second substrate;
- attaching the single crystal silicon thin-film and the second substrate to a third substrate on the exposed surface with an adhesive;
- and
- separating the single crystal silicon material and the third substrate from the second substrate, the thin-film of single crystal silicon material having an integrated circuit device formed therein.
A method of producing an integrated circuit device in a single crystal silicon material comprising:
- forming a thin-film of single crystal silicon material over a silicon dioxide layer and a first substrate;
- attaching a second substrate to a surface of the silicon thin-film with an adhesive;
- separating the silicon thin-film and silicon dioxide layer from the first substrate to provide an exposed surface;
- attaching the silicon thin-film and the second substrate to a third substrate on the exposed surface with an adhesive;
- and
- separating the single crystal silicon material and the third substrate from the second substrate, the thin-film having an integrated circuit device formed therein.
Dependencies are inferred from the claim text.