High efficiency VCSEL and method of fabrication
AssigneeMotorola, Inc.
InventorsMichael S. Lebby, Chan-Long Shieh, Hsing-Chung Lee
Life of this patent
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Abstract
A high efficiency vertical cavity surface emitting laser with first and second mirror stacks and an active area sandwiched therebetween. The second mirror stack is formed into a mesa with exposed end surface and outer sidewalls and a centrally located light emission region. A portion of the mesa adjacent the exposed outer sidewalls has a reduced electrical conductance so as to spread operating current from the outer sidewalls into the centrally located light emission region. The electrical conductance of the portion is reduced by oxidizing or etching the outer sidewalls.
Claims14
A method of fabricating a high efficiency vertical cavity surface emitting laser comprising the steps of:
- forming first and second mirror stacks with an active area sandwiched therebetween;
- forming the second mirror stack into a mesa with exposed end surface and outer sidewalls and a centrally located light emission region;
- reducing the electrical conductance of a portion of the second mirror stack adjacent the exposed outer sidewalls to channel operating current from the outer sidewalls into the centrally located light emission region;
- and
- forming an electrical contact at least on the end surface of the mesa in overlying relationship to the portion of the second mirror stack with reduced electrical conductance.
A high efficiency vertical cavity surface emitting laser comprising:
- first and second mirror stacks with an active area sandwiched therebetween;
- the second mirror stack being formed into a mesa with exposed end surface and outer sidewalls and a centrally located light emission region;
- a portion of the second mirror stack adjacent the exposed outer sidewalls having a reduced electrical conductance so as to channel operating current from the outer sidewalls into the centrally located light emission region;
- and
- an electrical contact at least on the end surface of the mesa in overlying relationship to the portion of the second mirror stack with reduced electrical conductance.
Dependencies are inferred from the claim text.