US 5,359,389 A · Exposure apparatus including two illuminating systems and exposure process using the same

Abstract

Disclosed are an exposure apparatus and process, including a holding unit for holding first and second objects such as a mask and a substrate, a first illumination system for illuminating the first object with an exposure light, a projection optical system for forming an image of a portion such as a pattern portion of the first object illuminated with the exposure light onto the second object and a second illumination system for illuminating a portion such as peripheral portion of the second object held by the holding unit outside of a portion of the second object illuminated with the exposure light from the first illumination system. The exposure apparatus or process may further include a moving unit or step for moving the first and second objects as a unit relative to the projection optical system and a control unit or step for causing the moving unit to move the first and second objects as a unit relative to the projection optical system while causing the first illumination system and the second illumination system to illuminate the first object and the second object, respectively, so that the image of the pattern on the first object is tranferred onto the second object through the projection optical system.

Claims27

Dependent claims

An exposure apparatus for transferring a pattern on a first object onto a second object, said apparatus comprising:

holding means for holding the first and second objects;
first illumination means for illuminating the first object held by said holding means with an exposure light;
projection optical means for projecting an image of a portion of the first object, illuminated with the exposure light, through the first object onto the second object held by said holding means;
second illumination means for illuminating a portion of the second object held by said holding means, outside of a portion of the second object illuminated with the exposure light from said first illumination means, wherein said first illumination means simultaneously illuminates the first object, while said second illumination means illuminates the portion of the second object, respectively;
and
moving means for moving the first and second objects relative to said projection optical means during the simultaneous illumination by said first and second illumination means.

3 more elements

Dependencies are inferred from the claim text.

Exposure apparatus including two illuminating systems and exposure process using the same

Life of this patent

Exposure apparatus including two illuminating systems and exposure process using the same

Life of this patent

Abstract

Claims27