Fluid metering apparatus
AssigneeBronkhorst High-Tech B.V.
InventorWijbren Jouwsma
Life of this patent
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Abstract
Device for measuring pressure differences or mass portions in a fluid flow--gas or liquid--and/or for implementing processes for mixing fluids, whereby when in use the fluid flows into the device, then passes a part therein where the fluid flow is laminar and the flow measurement is made, and finally flows out of the device, whereby the device has a turbulence filter which is integrated therein, with a settling chamber behind it. The fluid then first flows through that filter, so that a laminar flow leads to the flow measuring element.
Claims6
An instrument for measuring mass flow or pressure difference in a fluid stream, comprising:
- a body having an inlet for the fluid stream;
- inside the body a device comprising a turbulence filter for receiving the fluid steam and for forming downstream a laminar flow, a settling chamber downstream of the turbulence filter for receiving and maintaining the laminar flow, and a laminar flow element integrated with the turbulence filter and situated downstream of the settling chamber for maintaining the laminar flow;
- an outlet downstream of the laminar flow element;
- said device comprising at least one set of plates piled on top of each other, each plate having inflow and outflow openings for the fluid stream, a part of each plate having on one side first and second spaced substantially parallel groove sets which run from the inflow opening to the outflow opening, said plates being piled on top of each other such that said grooves form channels of such dimensions that the fluid stream flows through them in a laminar manner, the first groove set forming the turbulence filter, the space between the first and second groove sets forming the settling chamber, the second groove set forming the laminar flow element;
- means including said body for directing the fluid flow through the turbulence filter, settling chamber and laminar flow element in a straight line;
- means for coupling a flow measuring sensor between the settling chamber and a device region downstream of the second groove set.
Dependencies are inferred from the claim text.