Apparatus and method for automatically adjusting power output of an ultrasonic generator
AssigneeKulicke & Soffa Investments, Inc.
InventorsJames M. Weaver, Michael J. Sowers
Life of this patent
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Abstract
Apparatus and a method for controlling the power output of an ultrasonic generator to a transducer includes a variable impedance network circuit which is interposed between the generator and the transducer. Sensing circuits and a microprocessor are coupled to the input of the transducer so that the total impedance Z.sub.T, the transducer impedance in free air Z.sub.FA and the load impedance Z.sub.L may be calculated and the network impedance Z.sub.NW may be set for a bonding operation to maintain the power level P.sub.L or the impedance Z.sub.L at a desired predetermined level.
Claims13
Apparatus for adjusting the power output of an ultrasonic generator to a transducer comprising:
- an ultrasonic power generator,
- a variable impedance network coupled to the output of said ultrasonic power generator,
- an ultrasonic transducer coupled to the output of said variable impedance network,
- said variable impedance network comprising a variable impedance transistor circuit coupled in series between the output of said ultrasonic power generator and the input to said ultrasonic transducer,
- microprocessor means coupled to said ultrasonic power generator and to said variable impedance network,
- means for sensing current and voltage values at the output of said ultrasonic power generator coupled to said microprocessor means, and
- control means coupled to said microprocessor means and to said variable impedance network for setting a predetermined impedance in series between said ultrasonic power generator and said ultrasonic transducer.
A method of controlling the power delivered to a bonding tool during a bonding operation, comprising the steps of:
- connecting a variable impedance network comprising resistance components connected in series between an ultrasonic power generator and an ultrasonic transducer of the type adapted to hold a bonding tool,
- providing a microprocessor for controlling the output of said ultrasonic generator and said variable impedance network,
- sensing the output values of said ultrasonic generator coupled to said ultrasonic transducer to determine the bonding load,
- controlling the value of said variable impedance network in a preferred mode of operation by,
- calculating a predetermined desired network impedance (Z.sub.NW) to be inserted in series between said ultrasonic power generator and said ultrasonic transducer for a bonding operation to deliver a predetermined amount of power through said ultrasonic transducer, and
- switching said desired network impedance (Z.sub.NW) value in series between said ultrasonic power generator and said ultrasonic transducer before a bonding operation.
Apparatus for adjusting the power output of an ultrasonic generator to a transducer comprising:
- an ultrasonic power generator,
- a variable impedance network coupled to the output of said ultrasonic power generator,
- an ultrasonic transducer coupled to the output of said variable impedance network,
- said variable impedance network comprises a plurality of resistors coupled in series and operably selected or bypassed by relays operated by a switch actuation network,
- microprocessor means coupled to said ultrasonic power generator and to said variable impedance network,
- means for sensing current and voltage values at the output of said ultrasonic power generator coupled to said microprocessor means, and
- control means coupled to said microprocessor means and to said variable impedance network for setting a predetermined impedance in series between said ultrasonic power generator and said ultrasonic transducer.
Dependencies are inferred from the claim text.