Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same
AssigneeCanon Kabushiki Kaisha
InventorsYoshio Suzuki, Yutaka Hirai, Osamu Takamatsu, Masaru Nakayama, Takayuki Yagi, Yuji Kasanuki, Keisuke Yamamoto, Yasuhiro Shimada
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Abstract
A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
Claims36
A cantilever type displacement element comprising a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
A cantilever type displacement element comprising a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
A scanning tunneling microscope comprising:
- a cantilever type displacement element including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever,
- a probe and an outgoing electrode connected to the probe, and
- means for displaying/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element,
- said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
An information processing apparatus comprising a cantilever type displacement element including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-toothed portions disposed separately as facing and alongside of each other in the width direction of the cantilever,
- a probe and an outgoing electrode connected to the probe,
- means for displaying/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element,
- said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
A scanning tunneling microscope comprising:
- a cantilever type displacement element including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever,
- a probe and an outgoing electrode connected to the probe,
- means for displacing/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element,
- said probe being positionable in a close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
A scanning tunneling microscope comprising:
- a plural number of cantilever type displacement elements each including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever,
- a probe and an outgoing electrode connected to the probe, and
- means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements,
- said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
A scanning tunneling microscope comprising:
- a plural number of cantilever type displacement elements each including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever,
- a probe and an outgoing electrode connected to the probe for each of said elements, and
- means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements,
- said probe being positionable in close proximity of a sample to be observed for applying a voltage therebetween to generate an electrical current and detecting the current to output the surface information of the sample based on the current detected.
An information processing apparatus comprising a cantilever type displacement element including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever,
- a probe and an outgoing electrode connected to the probe, and
- means for displacing/driving said element and a voltage application circuit connected to the probe and to the outgoing electrode of said element,
- said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
An information processing apparatus comprising a plural number of cantilever type displacement elements each including a piezoelectric layer and at least two pairs of electrodes for applying a voltage to said piezoelectric layer, at least one of said electrode pairs being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever,
- a probe and an outgoing electrode connected to the probe for each of the elements, and
- means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements,
- said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
An information processing apparatus comprising a plural number of cantilever type displacement elements each including a first piezoelectric layer, a second piezoelectric layer laminated thereon, and a comb-shaped electrode pair provided in each of said first and second piezoelectric layers for applying a voltage displacing the first and second piezoelectric layers by a reverse piezoelectric effect, each of said electrode pairs having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever,
- a probe and an outgoing electrode connected to the probe for each of the elements, and
- means for displacing/driving each of said elements and a voltage application circuit connected to the probe and to the outgoing electrode of each of said elements,
- said probe being positionable in close proximity of a recording medium for applying a voltage therebetween to write and/or read an information into or out of said medium.
Dependencies are inferred from the claim text.