US 5,355,577 A · Method and apparatus for the assembly of microfabricated devices

Abstract

Abstract: A method of rapidly assembling many discrete microelectronic or micro-mechanical devices 56 (FIG. 2 ) in a precise configuration (FIG. 8f). The devices are placed randomly on a template (FIG. 3 ) consisting of a pair of oppositely charged planar electrodes. The upper electrode contains a multiplicity of apertures. The template is vibrated and the devices are attracted to the apertures and trapped thereat. The shape of a given aperture determines the number, orientation, and type of device that it traps. The process is completed by mechanically and electrically connecting the devices. The present method for serf-assembly allows many sub-millimeter sized electronic components or other particles to be rapidly assembled into a predetermined configuration. The method relies on vibration and weak electrical or magnetic forces.

Claims6

Dependent claims

Apparatus for arranging microfabricated devices in a predetermined planar pattern, comprising:

(a) a cell or container for containing said microfabricated particles;
(b) vibration means for rapidly agitating the particles within the container;
(c) a template comprising
(1) a first planar electrode overlying an inner surface of said container;
(2) a second, parallel planar electrode substantially covering said first electrode, and having a plurality of apertures;
and
(d) a voltage source applied between the electrodes,
whereby the voltage causes electric flux to emanate from each aperture, thus attracting and binding any particle which may randomly approach an aperture under influence of the vibration, allowing rapid assembly of the particles into substantially any desired pattern, as determined by the placement of the apertures.

5 more elements

A method of fabricating an array of spaced discrete particles, comprising the steps of:

(a) providing a cell or container;
(b) providing a template comprising:
(1) a first planar electrode overlying an inner surface of said container;
and
(2) a second, parallel planar electrode substantially covering said first electrode, and having a plurality of apertures;
(c) placing a plurality of the discrete particles in the container;
(d) applying a voltage source between the electrodes;
and
(e) agitating the particles,
whereby the voltage causes electric flux to emanate from each aperture, thus attracting and binding any particle which may randomly approach an aperture under influence of the vibration, allowing rapid assembly of the particles into a desired planar pattern, as determined by the placement of the apertures.

7 more elements

Dependencies are inferred from the claim text.

Method and apparatus for the assembly of microfabricated devices

Life of this patent

Method and apparatus for the assembly of microfabricated devices

Life of this patent

Abstract

Claims6